JPS6186514U - - Google Patents
Info
- Publication number
- JPS6186514U JPS6186514U JP17281384U JP17281384U JPS6186514U JP S6186514 U JPS6186514 U JP S6186514U JP 17281384 U JP17281384 U JP 17281384U JP 17281384 U JP17281384 U JP 17281384U JP S6186514 U JPS6186514 U JP S6186514U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- plate
- ventilation pipe
- gas
- cleaning cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009423 ventilation Methods 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims description 2
- 239000010419 fine particle Substances 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17281384U JPH0143455Y2 (en]) | 1984-11-13 | 1984-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17281384U JPH0143455Y2 (en]) | 1984-11-13 | 1984-11-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6186514U true JPS6186514U (en]) | 1986-06-06 |
| JPH0143455Y2 JPH0143455Y2 (en]) | 1989-12-18 |
Family
ID=30730472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17281384U Expired JPH0143455Y2 (en]) | 1984-11-13 | 1984-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0143455Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5081527B2 (ja) * | 2007-07-26 | 2012-11-28 | 東京エレクトロン株式会社 | 気体清浄化装置及び気体清浄化方法 |
| JP5442818B2 (ja) * | 2012-09-03 | 2014-03-12 | 東京エレクトロン株式会社 | 気体清浄化装置 |
-
1984
- 1984-11-13 JP JP17281384U patent/JPH0143455Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0143455Y2 (en]) | 1989-12-18 |
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